同时对外承接真空涂覆设备以及另部件的制作和加工。

At the same time to undertake external vacuum coating equipment and other Parts of the production and processing.

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本发明涉及一种真空涂覆设备，其具有用于平板衬底的传输系统，平 板衬底被传输通过真空室。

The present invention relates to a vacuum covering equipment which is provided with a transmission system for the plate substrate that is transmitted through a vacuum chamber.

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用该法制备的减反射膜光学性能优良，生产设备简单，原料价格便宜，适宜在平板和真空管集热器玻璃表面上大面积涂覆减反射膜。

This method is charecterised by its good optical property. simple equipment, low cost of raw material and would be in practical use for large area antireflection coating preparation.

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