为实现环吹风系统供、回风平衡的自动控制，采用了体积流量控制器。
In order to automatically control the supply and return air balance in quench air systems, the volume flow controller is used.
研究分析了基于质量流量控制器、可编程序控制器和触摸屏的自动控制系统气体流量自动控制方法。
The MOCVD system is specifically introduced, and the gas flow automatic control method based on the mass flow controller(MFC) and programmable logic controller(PLC) is studied and analyzed.
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