本系统中的数字量由PLC控制，数字量主要控制真空系统、烧结炉和化学气相沉积炉中各通气管路中的开关量。
In the system the digital is controlled by PLC, digital is mainly used to control the switch data of pipeline in the vacuum system and metallurgical vessel and CVD vessel.
陶瓷薄膜的制备技术多种多样，如物理气相沉积、化学气相沉积、高温烧结和“溶胶-凝胶”法等。
There are many techniques for fabricating ceramic films such as PVD, CVD, high-temperature sintering and sol-gel method.
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