柯而勒照明 Koehler illumination
The system uses halogen lamp as the light source and the vertical resolution of 5 nm is obtained. The structure of Kohler illumination in the system ensures high spatial coherence.
该装置采用卤素灯照明,达到轴向分辨力5 nm,系统中的柯勒照明结构使其具有高空间相干性。
参考来源 - 基于白光干涉的自稳定定量相位成像系统·2,447,543篇论文数据,部分数据来源于NoteExpress
应用推荐