采用平板式加热器，均匀分布在工作室外壁。
Adopting the platetype heater to evenly distribute to heat over the outer wall of the chamber.
该腔室可具有联接 于腔室上并用于为腔室提供热量的至少一个板式加热器，以及位于腔 室上以有助于冷却腔室的多个翅片。
The chamber may have at least one plate heater coupled thereto for providing heat to the chamber and a plurality of fins on the chamber to assist in cooling the chamber.
如果板式电加热器的电功率不变时，电热板的温度就会升高。
Therefore the temperature of the heating plates will increase if the power of the electric heater is constant.
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