刻写机可以根据该掩模板加工文件加工出需要的掩模板。
Then the writing machine is able to fabricate such a mask with this kind of file.
综述了二元光学元件的常用制作工艺技术,包括台阶刻蚀法、薄膜沉积法、直接写入法、准分子激光加工法和灰阶掩模法。
The common fabrication technologies of binary optical elements were expatiated, including etching, thin-film deposition, direct writing, excimer laser projection and gray-scale masks.
介绍了LIGA加工工艺以及多层掩模技术、复制技术、外形磨削成型技术的现状。
LIGA process and the actualities of multiple masks technology, replication technology and contour polishing technology are introduced.
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