... receiving aperture 接收孔径 receiving objective 接收物镜 receiving optics 接收光学系统 ...
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接收器物镜 the receiver objective
接收物镜
Receiving objective
以上为机器翻译结果，长、整句建议使用 人工翻译 。
为了探测衬底是否处在检查设备的焦平面上，一种光学聚焦传感器被布置为通过物镜接收辐射光束。
To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens.
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