对于外延层必须达到的工艺参数，提出了一系列减小或抑制外延过程中扩散效应和自掺杂效应的工艺措施和方案，使外延层质量有了明显的提高；

For the parameter of the epitaxial layer, putting forward a series of measures that let up or repress deposition and self-doping when the epilayer processing, improve the epilayer quality.

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各向异性扩散在抑制噪声与保留边缘方面具有良好的性能，它实际上是一个微分迭代的过程，一个重要问题是这种迭代过程何时停止。

Anisotropic diffusion has good effect on reducing noise and preserving edge, in fact its an iterative process. An important question is to decide when the process should be stopped.

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