报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。
A novel micromachining torsion beam optical switch micro- actuator driven by electrostatic force was designed and simulated by means of Finite Element Method (FEM).
模拟结果表明，该微动作器的第一模态频率远低于第二模态，镜子的位移由梁的扭转引起。
The simulation shows that the first mode frequency for performance is near 1000Hz, which is much lower than that of the second mode. The displacement of mirror is caused by the torsion of beam.
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