本文介绍了同步辐射光刻镜扫描控制系统。
In this paper a scanning mirror control system is introduced.
根据物扫描的特点，完成扫描控制系统的自动控制。
According to the characteristics of object scanning, we complete scanning automation control system.
提出了一种基于光栅检测的单片机闭环扫描控制系统的设计方案。
A design method of microcomputer closed-loop scanning and control system based on grating check is presented.
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