...关键词：叉齿式;微硅加速度计;分辨率;量程;稳定性 [gap=698]Key words：multi-finger; micromechanical silicon accelerometer;resolution;full scale;stability ...
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文中介绍了扭摆式硅微加速度计的结构原理和对其进行最大灵敏度优化设计的方法。
The structure, principle and the maximum sensitivity optimum design method of pendulous micromachined silicon accelerometer (PMSA) are introduced in this paper.
并以硅微加速度计为例对该设计思想和平台进行了验证。
Finally, a micro accelerometer design is carried out under the platform to Drove the correctness of the idea.
本发明是一种结 构尺寸小、集成度高、调制速度快的硅基环形谐振腔的微加速度计。
The invention is a micro-accelerometer of the silica-based ring resonator with the advantages of small size structure, high integration level and high modulation speed.
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