半导体物理学是凝聚态物理学的一个重要分支,也是现代微电子器件工艺学的理论核心。
Semiconductor physics is recognized as one of the major areas of condensed matter physics and the core of modern micro-electronics device technology.
本文介绍了利用半导体硅材料制作的真空微电子器件的核心部件,场致发射硅锥阴极,的工艺研究及实验结果。
A process for the fabrication of Si cone cathode for the build up of vacuum microelectronic devices is proposed and its experimental results are given.
目前承担微电子专业方向的主干课程:固态电子论、微电子器件与原理、集成电路设计,微电子工艺等课程。
It has key courses of microelectronics: solid-state electronic theory, microelectronic devices and principles, integrated circuit design, micro-electronics processing, etc.
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