... microlithography1缩微平版2印刷术3显微光刻 microlock微波锁定 microlux微勒 ...
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本文提出用微波激励板条形波导CO_2激光器，以期在远场实现同相锁定相干输出。
A slab waveguide CO_2 laser excited by microwave has been designed and constructed to obtain the output in phase locking coherence.
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