通过对张力测试的分析及传感器的原理分析，介绍一种应用于测试微电子集成电路丝线张力的小量程张力测试机构的设计。
This paper introduces a design of machine in small range tension test which is applied to a field of micro-electronics integrate circuit, by analyzing tasting method and sensor theory.
文中研究了索张力传感器的测试机理，导出了传感器测力信号与索张力的关系。
Testing mechanism of the sensor is researched and the relation between test signal and tension is deduced.
针对原有自动界面张力仪测试方法存在的不足，提出了改进措施：（1）使用磁罐密封式传感器；
In view of the deficiency existing in test method of original automatic interface tensiometer, some improvement measures have been suggested as follows: (1) adopting magnetic pot sealed sensor;
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