具有两个(或一个)光学测量平面的正圆柱形或长方形的量规。
文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度。
A new laser interferometer method is presented and used to quick measurement of parallelism of optical flat.
文章重点分析干涉条纹的快速调整方法与标准平晶平面度的正确引用方法。
Quick adjusting method of interference fringes and correct quotation method of standard optical flat flatness are analyzed.
讨论了子孔径拼接的基本原理,建立了子孔径拼接模型,确定了进行长平晶拼接测试的基本算法。
The principle was discussed. Testing the model of sub-aperture stitching were established. According to the basic theory of least-squ, a program was designed for it.
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