针对半球谐振陀螺仪的工艺制造偏差，研究半球谐振子薄壁厚度不均匀对陀螺精度的影响，建立误差模型，分析误差机理。
For the HRG's technology fabrication deviation, effect of the resonator's thickness nonuniformity on the gyro accuracy is studied. The error model is established and the error mechanism is analyzed.
工艺参数的变异导致半导体制造过程的偏差。
The process variation accounts for deviations in the semiconductor fabrication process.
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