应用计算机软件技术、误差理论及数据处理技术，完成了测量及数据处理系统软件编制，得到了有效消除工件表面测量误差的方法。
With the help of computer technology, error theory and data processing method, software was developed to deal with data measurement and data processing and a way was found to remove measurement error.
在预处理系统被清洗的工件上的杂质。
Foreign matter on a part of the substrate to be cleaned in a pre-treatment system.
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