射频电源是可以产生固定频率的正弦波电压,频率在射频范围(约3KHz~300GHz)内、具有一定功率的电源。 射频电源已广泛应用于半导体工艺设备;LED与太阳能光伏产业;科学实验中的等离子体发生;射频感应加热;医疗美容;常压等离子体消毒清洗等。
射频电源(rf generator)是用来孕育发生射频电功率的电源。它的输出通常为正弦波或者电子脉冲,频率有2mhz、13.56mhz、27.12mhz、60mhz等规格,输出功率从几...
基于80个网页-相关网页
Base on the analysis and study , the RF excited CO_2 laser of discharging gas equivalent circuit can be designed and provide the essential condition of the RF power.
在此基础上建立了射频激励CO 2激光器放电的等效电路,为射频电源的成功研制准备了必要条件。
参考来源 - 射频激励CO·2,447,543篇论文数据,部分数据来源于NoteExpress
这一结果同样适用于其它射频电源的阻抗匹配研究。
This result is applicable to the impedance matching of other RF power.
在此基础上建立了射频激励CO_2激光器放电气体等效电路,为射频电源的成功研制准备了必要的条件。
Based on the analysis and study, the RF excited CO_2 laser of discharging gas equivalent circuit can be designed and provide the essential condition of the RF power.
感应耦合等离子体触角安装在介电窗上以便定位在介电窗的中心上,并且将来自射频电源的射频功率传输到加工室内部。
An inductively coupled plasma antenna, which is installed on a center of the dielectric window, transfers radio frequency power from an RF power supply to the interior of the processing chamber.
应用推荐