实验证明，采用一步扩散法制备的氧化层的厚度和质量都很好的满足了机械刻槽埋栅电池的工艺要求；
The experiment proves the requirement of the device and the process in the quality and thickness of the silicon oxidation layer is well met.
报道了机械刻槽埋栅高效硅太阳电池的实验研究结果。
This paper describes the experiment and the results of the buried contact silicon solar cells with mechanical grooving.
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