各向异性刻蚀是指刻蚀本身在一个方向上的特性,也即,完美的各向异性刻蚀应该仅在一个方向上刻蚀。
[转帖]石英微机械惯性传感器的加工技术 关键词 :石英;微机械陀螺;各向异性刻蚀[gap=4644]Keywords : Quartz, Micromachined Gyro, Anisotropic Etching
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各向异性蚀刻 anisotropic etching
The QVBA key micro-machined technology are also developed in this paper, such as: single step double sides multilayer photolithographic process, quartz crystal anisotropic etching process.
在仿真分析基础上,完成了石英振梁加速度计的设计及关键微加工工艺研究,包括:单步双面多层光刻工艺、石英晶体各向异性刻蚀工艺等。
参考来源 - 石英振梁加速度计技术研究·2,447,543篇论文数据,部分数据来源于NoteExpress
该装置具有结构简单,低损伤和各向异性刻蚀的优点。
It has advantages of sample structure, low damage and anisotropic etching.
报道了一种利用旋转体自身角速度作为驱动力,通过各向异性刻蚀硅片制作的硅微机械陀螺。
This paper reported a silicon micromachined gyroscope that is driven by the rotating carrier's angular velocity. The silicon chip was manufactured by anisotropy etching.
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