单轴双折射膜既可以消除了双盒补偿的缺点,又达到了黑白补偿的目的。
Uniaxial birefringence film can banish the disadvantage of double cells and can gain black-white compensation's end.
EUV掩膜板被自动送入和送出双盒容器(Dual pod)中;其中内层盒可以储存在InSync系统的环境下。
EUV masks are automatically transferred into and out of the dual pod; the inner pod can be stored inside the InSync environment.
在实数域分形盒维数计算方法的基础上,提出了双金字塔数据形式的盒维数快速计算方法。
In this paper, a fast approach for box dimension estimation based on a dual pyramid data structure is developed.
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