采用双晶片探头和电子天平对PZT微力传感器进行静态力标定,进而利用双晶片探头和电荷放大器对PZT微力传感器进行准静态标定,微小信号检测通过锁相放大器来实现。
PZT micro -force sensors were calibrated by bimorph and electronic balance in static state and by bimorph and charge amplifier in dynamic state, small signal was tested by amplifier.
可配备多种不同频率、不同晶片尺寸的双晶探头使用;
Can is equipped with a variety of different frequencies, different wafer size twin probe using;
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