... ； 压电扫描器 ； 光电检测器 ； 运行模式 [gap=9725]Keywords Atomic force microscope, Cantilever, Piezoelectric scanner, Photoelectric diode, Work modes ...
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针对扫描探针显微镜的压电扫描器提出一种非线性校正方法。
A calibration method for the non-linearity of the Scanning Probe Microscope (SPM) "s PZT scanner was described."
介绍了全新概念的低温压电角扫描器(PZTA)的理论特性和制作技术。
The theory characteristics and the making technique of a novel piezoelectric optical Angle scanner (PZTA) are introduced in this paper.
三维压电陶瓷扫描器是扫描探针显微镜的关键部件。
The piezoelectric scanner is one of the key components of scanning probe microscope.
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