本发明涉及一种压印模仁及压印模仁的制造方法。
The invention relates to an impressing mold insert and a method for manufacturing the same.
采用电子束直写、步进制模、压印翻制的压印模具生产工艺，其模具的制造是目前面临的难点。
The mold manufacturing is the key part in imprint lithography process, which includes electron beam direct writing, stepping molding, and the conversion from small mold to big mold.
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