激光光刻是加工微光学及二元光学掩模的主要手段。
Laser lithography is one of the main methods for manufacturing micro-optical and the binary optical masks.
该方 法包括：将需要的图纹通过激光全息术记录到感光板上，制得具有全息图纹 的光学掩模板；
The method comprises the following steps: recording a required pattern onto a photographic plate through laser holography and manufacturing an optical mask plate with the holographic pattern;
综述了二元光学元件的常用制作工艺技术，包括台阶刻蚀法、薄膜沉积法、直接写入法、准分子激光加工法和灰阶掩模法。
The common fabrication technologies of binary optical elements were expatiated, including etching, thin-film deposition, direct writing, excimer laser projection and gray-scale masks.
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