合并单元/确认指定 CXAQ Cons Unit/Validation Assignments

危险带电元件的确定 Determination of HAZARDOUS LIVE parts

进入元模式确定 Enter META mode OK

确定单元 commit unit

精确单元方法 exact element method

丰富多元、明晰准确 Rich diversity, clear and accurate ; rich and diverse, clear and precise

确保信元速率 Sustained Cell Rate ; SCR

吸着确认单元2回路 Additional vacuum sensing unit

有限元精确建模 exactly modeling of FEM

确认基元 confirm primitive