本文从集合论的角度建立了模糊掩模的数学模型，认为模糊掩模是传统掩模的自然扩展。
As a mathematical model created based on the set theory, fuzzy masking can be treated as a natural extention of the traditional masking.
介绍亚分辨图形掩模的原理、应用及具有亚分辨图形的相移掩模和传统掩模的制作方法和工艺。
Described are principles, applications and fabrication process of conventional masks and phase-shifting masks with sub-resolution pattems.
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