通过拟合计算结果，得到了峰值反射率、带宽和中心波长与粗糙度的函数关系。
Three functions of peak reflectivity and bandwidth and centroid wavelength related to roughness are obtained by fitting above results.
建立了兼含粗糙度与波面像差影响的中心点亮度比公式及其像质评价准则。
The formula and criterion of the Strehl intensity ratio consisting of the aberration and roughness are developed.
通过对极紫外多层膜反射特性的分析，得到了峰值反射率、带宽和中心波长分别随粗糙度、周期厚度以及比值变化的函数关系。
By analyzing reflective properties of multilayers, the peak reflectivity, bandwidth and centroid wavelength as a function of roughness, period thickness and thickness ratio were obtained.
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