... 对晶圆黏胶片吹热风 wafer shipping box 晶圆输送盒 wafer stage 晶圆载物吸盘 wafer surface inspection ...
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Taking advantage of synchronization compensator, position compensation is fulfilled by using the fine reticle stage to compensate the deviation between position of the wafer stage and wafer stage.
设计了同步补偿器,利用掩模台微动台运动实时补偿掩模台与硅片台间的位置同步误差。
参考来源 - 极紫外光刻机工件台精密机械及控制相关技术·2,447,543篇论文数据,部分数据来源于NoteExpress
Motion control system of an ultra precision wafer stage with application to integrated circuit production was presented.
描述一种应用于集成电路制造的超精密硅片台系统及其运动控制。
A novel in-situ non-flatness measurement method of wafer stage mirrors in a step-and scan lithographic tool is presented.
提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。
Wafer slicing would increase to 500mw by the end of the second quarter, with further capacity expansions in the planning stage.
第二季度末,硅片产量将会增加满足500兆瓦的产能,公司的下一步扩产产能还在计划阶段。
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