... wafer positioner 薄片定位器 wafer prealignment 薄片预对准 wafer printer 晶片光刻装配 ...
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...关键词: 微电子制造;光学预对准;硅片形心;误差补偿 [gap=1316]keywords: microelectronics manufacture;wafer prealignment;shape center of wafer;error compensation ...
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wafer r prealignment 薄片预对准
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Mostly introduction the of detection and the of prealignment technology of the Wafer Loader system in the Projection-Lithography equipment.
介绍投影光刻机设备的晶片传输系统中切边探测和晶片预对准技术。
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