Principle of measurement and composition of the piezo-quartz system are expounded, and reasonable crystal groups and test circuit are selected. Then on-line force-measuring platform of wafer grinder is designed.
分析了压电测试系统的组成和测量原理,选择了合理的压电晶组和测试线路,设计了晶圆磨床在线测量动态磨削力的测力平台。
参考来源 - 晶圆磨床磨削力在线测量系统的研究与设计·2,447,543篇论文数据,部分数据来源于NoteExpress
应用推荐