The reactants are initially pumped vertically downward by the viscose drag force of the high speed rotating disk, and then are deflected to form a flow region that is parallel to the wafer carrier.
反应物在初始阶段因高速旋转盘的牵引力被竖直向下地泵入,然后偏斜形成一个与衬底片托盘平行的流动区域。
Alternatively, coating the wafer with a nanotube-containing solvent by spinning the disk like a phonograph record also had its problems.
而要是使晶圆像留声机唱盘那样旋转,让含有奈米碳管的溶剂附著在晶圆表面,也还是有问题。
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