... 真空淀积系统：vacuum deposition system 真空淀积技术：vacuum deposition technique 真空电容：vacuum capacitance ...
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A technique - filtered vacuum arc ion coating for thin film deposition-is reviewed in this paper.
介绍了一种新的镀膜技术—过滤式真空电弧离子镀膜技术。
Based on the introduction of pulsed film deposition and vacuum arc technique, the principles, characters, research developments and applications of laser-arc technique are presented.
本文首先介绍了脉冲激光蒸发沉积以及真空弧沉积技术，在此基础上对激光真空弧技术的原理、特点、研究现状及应用进行了文献综述。
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