Two-leveled islands and beam-diaphragm structure realize high output sensitivity and excellent nonlinearity. Appropriate passivation layer stress complementary technology is the core of Non-stress manufacture.
双岛梁膜结构取得了很高的输出灵敏度及优良的线性度,合理的钝化层应力互补技术是无应力制造技术的核心。
参考来源 - 硅压阻微压传感器的设计·2,447,543篇论文数据，部分数据来源于NoteExpress
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