The fluid transmission mechanism is a key infrastructure of immersion lithography equipment, which is used to execute the liquid dispensation and recovery, and ensures no leakage or bubbles.
浸没液体传送装置是浸没光刻设备中的一个关键组件，用来实现缝隙内液体的平稳注入和回收，同时保证无泄漏和气泡产生。
Even though it is not necessarily leakage of the transmission fluid, you should consult the professionally trained technicians if you happen to experience any.
虽然它不一定是输送流体的泄漏，你应该咨询经过专业培训的技术人员如果你碰巧有。
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