Chemical passivation: will contain antioxidant parts in solution in processing, make the surface to form a thin film of the state of the process. Blunt.
化学钝化：将制件放在含有氧化剂的溶液中处理，使表面形成一层很薄的钝态保护膜的过程。
Through the selection of processing parameters and surface modification. The distribution of thin film stress is possible changed and thin film property is improved.
通过选择适当的工艺条件以及表面处理可以改变薄膜的应力分布，提高薄膜的性能。
A new technique for fabricating EMIF in thin film IC based on superfine processing technique is proposed.
提出一种基于集成电路超微细加工技术制造电磁干扰滤波器的薄膜集成制造新技术。
应用推荐