... 热动元件 thermal actuator 金属热膜元件 METALLIC HOTFILM ELEMENT ; FILM ELEMENT 热导元件检测器 thermal conductivity cell detector ...
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MEMS thermal actuator MEMS热执行器
Micro Array Thermal Actuator 微阵列式热致动器 ; 器
electro-thermal actuator 电热微驱动器
lateral thermal actuator 横向热执行器
composite structure electro-thermal actuator 复合结构电热微驱动器
U-shaped flexural electro-thermal actuator U型电热式微致动器
thermal micro-actuator 热微执行器
A single-pole single-throw SPST MEMS switch based on folded U-shaped beam thermal actuator and a single-pole double-throw SPDT MEMS switch based on V-shaped beam thermal actuator were designed. The switches were fabricated using the MetalMUMPs process from MEMSCAP Company.
提出了基于折叠U型梁热驱动器的单刀单掷开关结构和基于V型梁热驱动器的单刀双掷开关结构,利用IntelliSuit有限元软件对这两种开关进行热-电-机械耦合分析。
参考来源 - 横向热驱动RF MEMS开关研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Cantilever fracture force is provided by the thermal actuator.
热执行器用来作为悬臂梁断裂的驱动源。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
介绍了一种由非硅微加工技术制作的电热微驱动器。
A flexural oscillation model about V-shaped silicon electro-thermal micro actuator is presented.
提出了V型电热硅微致动器的弯曲振动力学模型。
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