The synthesis, structure, properties and process interaction of low k dielectrics are reviewed. Characterization techniques for low k dielectric films are summarized.
综述了低介电常数介质薄膜的制备方法、结构与性能表征、工艺兼容性等领域的最新进展。
Synthesis, Characterization and Fluorescence Properties of Rare Earth with p-Chloro-benzoic Acid and 2,4,6-Tris-(2-pyridyl)-s-triazine.
对氯苯甲酸-2，4，6-三吡啶基三嗪稀土配合物的合成、表征及发光性能。
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