The effect of substrate bias voltage and gas flow rate were investigated systemically on the compositions,structures and properties of zirconium nitride and zirconium oxide films.
在研究中,主要探讨分别改变反应气体流量和基底偏压对氮化钛、氮化锆薄膜的组成、结构及性质的影响。
参考来源 - 阴极真空电弧技术制备氮化锆、氧化锆薄膜的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
And, with the enhancement of substrate bias voltage, electron energy increase gradually, electron density decrease sharply.
且随着基片偏压值的增大，电子能量有缓慢的增加，而电子密度则显著下降。
By controlling pressure, type of diamondoid precursor and bias voltage, the new method prevents the diamondoid precursor from fully breaking upon impact with the substrate.
通过控制压力、类金刚石母体的种类和偏置电压，这种新的方法防止了类金刚石母体在撞击基材时完全解体。
Influence of discharge parameters such as RF power and working pressure on the negative self-bias voltage of substrate was investigated by an oscilloscope with a high voltage probe.
采用高压探头示波器系统研究了射频辉光放电参数对自偏压的影响规律。
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