In comparison with laser plasma soft X-ray sources using metal target, the light source is debris-free.
与金属靶激光等离子体软x射线源相比，此光源无碎屑。
And it has higher operating frequency than gas target soft X-ray sources whose nozzle is controlled by a solenoid valve.
与喷嘴由电磁阀控制的气体靶激光等离子体软x射线源相比，它有较高的工作频率。
The main topics discussed in this paper are soft X-ray plasma sources, multilayer soft X-ray mirrors and soft X-ray microscopes.
本文主要介绍软X射线等离子体光源、多层膜软X射线反射镜和软X射线显微镜。
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