一种以多晶硅为振动膜的MEMS传声器研制_电子资料文库 关键词:电容式传声器;MEMS器件;多晶硅薄膜;磷硅玻璃牺牲层 [gap=937]Key words:silicon microphone;MEMS device;polysilicon diaphragm;sacrificial PSG
基于16个网页-相关网页
Mems Silicon Microphone MEMS硅微麦克风
silicon condenser microphone 硅基电容式微传声器
silicon condenser micromachined microphone 硅微机械电容式麦克风
condenser silicon micromachined microphone 电容式硅微机械麦克风
Silicon micro-microphone 硅微传声器
For Computer Aided Design of silicon microphone, build up a new silicon microphone analogy circuit.
该文实现硅麦克风的计算机辅助设计，建立一套新型的硅麦克风类比电路。
The signal-to-noise ratio of the silicon capacitance microphone is improved, and the shielding effect is favorable.
提高 了硅电容麦克风的信噪比，屏蔽效果好。
Finally, the silicon condenser microphone with this anti-stiction structure was fabricated successfully.
最终我们研制成具有防粘结构的硅微电容传声器。
应用推荐