There is a gaseous secondary electron detector (GSED) in the chamber in ESEM' which offers new functions.
ESEM是在传统的SEM样品室中多一个GSED探头,因此,它在传统的SEM基础上增添了新的功能。
The second is using a secondary electron detector that could function in this non vacuum sample environment.
二是使用了一个在样品室非真空环境下仍然能起作用的二次电子探头。
The multi-stage vacuum system and gaseous secondary electron detector(GSED) for environmental scanning electron microscope(ESEM) were simply introduced and the basic principle of ESEM was discussed.
本文简单介绍了构成环境扫描电镜(ESEM)的多级真空系统和气体二次电子探测器,描述了ESEM的基本工作原理。
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