...谐振式压力传感器；绝缘体上硅；差分检测；阳极键合 [gap=875]Keywords: Micro-electromechanical system (MEMS); Resonant Pressure Sensor; SOI; Differentially detection; Anodic bonding ..
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silicon resonant pressure sensor 硅谐振压力传感器
Resonant beam pressure sensor 谐振梁压力传感器
resonant micro-machined pressure sensor 谐振式微机械压力传感器
A novel resonant pressure sensor structure is proposed.
提出了一种微机械谐振式压力传感器的新结构。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Based on dynamic analysis of resonator, speed resonant frequency detection for the resonant pressure sensor is compared to displacement resonant frequency detection systematically.
在谐振器动力学分析的基础上，系统地比较了谐振式压力传感器检测速度谐振频率和检测位移谐振频率的优缺点。
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