A new laser diode interferometer for micro vibration measurement is proposed. The interferometer can measure micro vibrations of an object in real time.

设计了一种半导体激光干涉测量仪，可以实时测量物体的微小振动。

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A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed.

提出一种实时测量表面形貌的正弦相位调制半导体激光干涉仪。

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