The researches of this paper are very important and significative job to improve precision of servo-control system of three axis optical tracking test table even all type of electric simulator tables.

本论文的研究对于提高三轴光学跟踪试验转台以至于所有电动仿真转台的伺服控制系统的精度来说，是一项十分重要和有意义的工作。

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Optical measurement system of high accuracy, precision coordinate test station;

高精度光学测量系统，精密坐标试台；

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Confocal scanning optical microscopy (CSOM) is a high precision microscopical image system which based on the confocal principle, scanning technology and image processing.

共焦扫描显微成像系统(C S O M)是以共焦原理为基础，集扫描技术和数字图像处理技术为一体的高精度的成像系统。

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