ECR plasma source ECR等离子源 ; ECR等离子体源
plasma-source 等离子体源
arc plasma source 弧等离子体源
plasma source ion 等离子体源离子
Hall plasma source 霍尔等离子体源
metal plasma source 金属等离子体源
MEVVA plasma source MEVVA等离子体源
laser plasma source 软X射线投影光刻原理装置
A new large area microwave plasma source has been developed.
研制了一种新的大面积微波等离子体源。
In this paper, a glow discharge plasma source ion implantation technique is described.
本文叙述了辉光放电等离子体源的等离子体源离子注入。
The design method for space plasma source and measurement system is introduced in this paper.
文章介绍了空间等离子体源与测试系统的设计方法。
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