等离子体蚀刻系统
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barrel type plasma etching system 圆筒型等离子体蚀刻系统
down stream plasma etching system 分离型等离子体蚀刻系统
inductively coupled plasma etching system 感应耦合型等离子体蚀刻系统
magnetization magneto-microwave plasma etching system 磁场微波型等离子体蚀刻系统
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Principles of microwave ECR plasma technology are introduced briefly. Present development of it'S research and applications in system manufacturing, CVD, PVD and etching is reviewed.
本文简要介绍了微波ECR等离子体技术的原理，评述了近年来这种技术在CVD、PVD、刻蚀等方面的研究和应用的进展。
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