...压阻；敏感薄膜；SOI（绝缘体上硅）；MEMS（微机电系统） [gap=1106]Keywords: high temperature pressure sensor；piezoresistance；sensitive membrane；SOI（Silicon on Insulator）；MEMS（Micro Electro Mechanical Syst..
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Piezoresistance transduction element 压阻转换元件
piezoresistance pressure transducer 压阻式压力传感器
piezoresistance coefficient 压电电阻系数
piezoresistance measurement 压电电阻测量
Meso-piezoresistance effect 介观压阻效应
piezoresistance pre ure tra ducer 压阻式压力传感器
piezoresistance characteristics under dynamical load 动态压阻特性
meso-piezoresistance 介观压阻效应
piezoresistance sensor 压阻传感器
Using Meso-piezoresistance effect of RTD as the principle of a novel accelerometer inthe first.
利用共振隧穿二极管的介观压阻特性，设计了新型的加速度计；
Silicon piezoresistance transducer is a new type pressure sensor which has smaller size, higher frequency response and other advantages.
硅压阻式传感器是一种新型压力传感器，它具有体积小，频响高等优点。
BP93420D-II is made of HT20 piezoresistance differential pressure sensor and integrated circuit. has capability of high precision, good stability, high reliability and good sensibility.
II 型由双隔离差压传感器和集成放大电路模块组成，具有高精度、稳定性好、可靠性高、动态性能好等特点。
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