Micro F-P cavity tunable filter, one of the Micro-opto-electro-mechanical devices, has been widely applied in the area of hyperspectral imaging, DWDM optical communication and self-adaptive optics.

微F-P腔可调谐滤波器主要运用于超光谱成像、DWDM光通信系统和自适应光学等系统中。

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This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.

从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。

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The structure of the EOS system is designed, including opto-mechanical delay line (OMDL), embodiment of electro-optic modulator, and lock-in detection module.

设计电光采样系统整体结构，设计光机械延迟线结构、电光采样结构、光电转换及微电流放大电路、锁相检测模块；

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