The process tool is operable to perform a process in accordance with an operating recipe.
该处理过程工具可操作以根据操作方案执行处理过程。
The charge pump is operable to convey a fluid from a fluid source toward the reaction chamber.
所述加料泵能够操作以把来自流体源的流体朝所述反应腔传送。
The check valve is operable to inhibit the flow of fluid from the reaction chamber toward the charge pump.
所述止回阀能够操作以阻止流体从所述反应腔向所述加料泵的流动。
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